A Scanning Elecron Microscope (SEM) is used to visualize the morphology, the chemical composition and the crystallography of the samples at high resolution. Thanks to Energy-dispersive X-ray spectroscopy analysis (EDX) it is possible to identify the elements which are present in the sample.


  • Sample morphology visualization
  • Composition contrast image (using backscattered electrons)
  • Chemical composition analysis through X-Rays generation (EDX)
  • Analysis of optoelectronic behaviour of semiconductors using cathodoluminescence
  • Depletion zones visualization (EBIC)